Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror
نویسندگان
چکیده
منابع مشابه
A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified...
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Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an ...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2016
ISSN: 1094-4087
DOI: 10.1364/oe.24.022650